本文介绍了二元光学元件的概况，衍射透镜理论，二元光学元件的制造方法以及发展趋势。
The introduction of binary optical elements, theory of diffractive lenses, fabrication of binary optical elements and trends are related.
根据菲涅耳衍射理论，采用微光学元件制作技术，通过三次套刻制作出八位相台阶的二元离轴菲涅耳透镜。
A binary Fresnel lens with 8 phase steps can be manufactured with micro-optical element fabricating technology and three times of alignment according to Fresnel diffraction theory.
指出线宽误差对二元光学元件衍射效率影响较大。
It is pointed out that the linewidth error has very large effect of BOEs diffractive efficiency.
最后，观察该二元光学元件的衍射花样图形并讨论其衍射特性。
Finally, the diffraction patterns of micro structure were observed to examine the features of binary DOE.
最后，观察该二元光学元件的衍射花样图形并讨论其衍射特性。
Finally, the diffraction patterns of micro structure were observed to examine the features of binary DOE.
应用推荐