Making method of high deep-width rate, batch production of planar windings with LIGA process and silicon deep etching process is researched .
较深入地研究了以LIGA工艺、硅深刻蚀工艺为主的平面绕阻的高深宽比、批量化制作方法。
In addition, by utilizing the wet type etching in the manufacture process, the batch amplification can be increased, and the cost of the manufacture process is decreased.
另外，在制造工艺中使用湿式蚀刻也可增加批次放大，降低制造工艺的成本。
In addition, by utilizing the wet type etching in the manufacture process, the batch amplification can be increased, and the cost of the manufacture process is decreased.
另外，在制造工艺中使用湿式蚀刻也可增加批次放大，降低制造工艺的成本。
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