随超精密装备加工精度和生产率的不断提高，直线气浮系统得到广泛重视和研究。
With the increasing demands for higher accuracy and higher productivity of the ultra-precision equipments, ultra-precision gas bearing stage systems driven by linear motor become research hotspots.
采用气浮工艺可以提高低温低浊处理效果，但投药量较大且气浮系统的能耗较高。
Efficiency of treatment for low temperature and low turbidity water by DAF can be improved, but it will lead to relatively large amount of consumption of chemical and energy.
用一个由恒微测力并经精确校准的气浮LVDT 传感器和相应软硬件组成的测量系统对非球面加工工件表面进行在机测量。
The On line measurement of aspheric workpiece surface is made by using a precise calibrated, low force, air bearing LVDT and the measuring system composed of corresponding software and hardware.
超精密气浮工件台系统是当前主流光刻机中的核心子系统，要求具有纳米级的重复定位精度和同步运动精度。
Stage system is one of the most important sub systems in a step and scanner, the accuracy of its positioning and synchronizing has reached nanometer level.
介绍了一种气浮转台无线测控系统设计方案。
A wireless measurement and control system on air-bearing turntable is introduced.
这种系统所采用的气浮轴承如果设计不当，会导致系统发生微幅振动，从而影响系统精度。
If the gas bearing used in the stage is not well designed, micro-vibration will take place, which makes the stage system lose its accuracy.
基于气浮轴承方法，建立了3自由度空间机械臂反作用优化地面实验系统。
Based on air bearings, a ground experiment system for optimizing the 3-dof space manipulator reaction is set up.
讨论了精密气浮轴系、驱动电机、装夹调心装置等关键部件的设计问题及测量系统的工作原理。
The measuring principle and some design problems of key techniques, including precision air - bearing, driven motor, fixture and aligning devices were discussed.
分析了浅池气浮净水系统中影响挟气污粒上浮速度的因素。
The affecting factors of floating speed of slops particles with gas bubbles in shallow tank flotation wastewater treatment system are analyzed.
采用CAF涡凹气浮和流砂过滤二级组合系统，对玉柴机器柴油废水进行了处理回用的应用研究。
A two-stage combination system with CAF cavitation floatation and running sand filtration was used for treating cutting liquid wastewater;
采用气浮/铁炭曝气/芬顿氧化/UASB/生物接触氧化工艺处理高浓度石化废水，介绍了系统的启动与运行情况。
The air flotation/Fe-C aeration/Fenton oxidation/UASB/bio-contact oxidation process was used to treat the high-concentration petrochemical wastewater.
采用气浮/铁炭曝气/芬顿氧化/UASB/生物接触氧化工艺处理高浓度石化废水，介绍了系统的启动与运行情况。
The air flotation/Fe-C aeration/Fenton oxidation/UASB/bio-contact oxidation process was used to treat the high-concentration petrochemical wastewater.
应用推荐