本发明涉及一种用于制造高质量半导体单晶锭的装置以及使用该装置的方法。
The present invention relates to an apparatus for manufacturing a high-quality semiconductor single crystal ingot and a method using the same.
本发明涉及一种用于制造高质量半导体单晶锭的装置以及使用该装置的方法。
The present invention relates to an apparatus for manufacturing a high-quality semiconductor single crystal ingot and a method using the same.
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